The 16th China International Nanotechnology Industry Expo (CHInano 2026)
Environmental vibration isolation for nanoindentation, microbalances, and lithography optics
Exhibition Background & Micro-Vibration Focus
CHInano is China's premier nanotechnology and micro-manufacturing expo. Floor vibrations often induce tip-drift on AFM probes and load-displacement hysteresis in nanoindenters. MOZHUN demonstrated real-time active stabilization and sub-micron isolation.
Focus Conditions: Environmental micro-vibration isolation for AFM, nanoindenter, ultramicrobalance, and cleanroom optical inspection systems.
Technical Highlights & Innovation
- Sub-micron active counter-force: 6-DOF closed-loop feedback suppressing ground-borne vibrations.
- In-situ SNR enhancement: Prevents AFM tip phase-shift jitter and microbalance zero-point drift.
- Quantified verification: Direct before-and-after spectral comparison against VC guidelines.
Featured On-Site Demonstration Systems
MOZHUN MZ-Active 紧凑型主动隔振台
微纳探针及纳米压痕仪微振抑制，高响应频宽，适配超净间桌面实验环境。
适用仪器：扫描探针显微镜（SPM/AFM）、纳米压痕仪、超微量分析天平
MOZHUN MZ-Insight 低频微振诊断系统
针对半导体与微纳制造洁净室的三向振动测量与频谱能级评定。
适用仪器：超净工作间机台、光刻物镜测试台、半导体量测机房
MOZHUN MZ-Balance 负刚度隔振台
面向十万分之一与百万分之一超微量称量，被动超低频隔离。
适用仪器：十万分之一超微量天平、微量热仪
On-Site Photography & Field Archives
